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ASTM E2244

Original price was: $54.00.Current price is: $32.00.

Standard Test Method for In-Plane Length Measurements of Thin, Reflecting Films Using an Optical Interferometer

Published by Publication Date Number of Pages
ASTM 05/01/2018 14

ASTM E2244 – Standard Test Method for In-Plane Length Measurements of Thin, Reflecting Films Using an Optical Interferometer

1.1 This test method covers a procedure for measuring in-plane lengths (including deflections) of patterned thin films. It applies only to films, such as found in microelectromechanical systems (MEMS) materials, which can be imaged using an optical interferometer, also called an interferometric microscope.

Product Details

Published:
05/01/2018
Number of Pages:
14
File Size:
1 file , 360 KB
Note:
This product is unavailable in Russia, Ukraine, Belarus

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ASTM E2244
Original price was: $54.00.Current price is: $32.00.