This IEST Recommended Practice is intended to provide guidance for maintaining a cleanroom at the level for which it was designed. It should be used as a guide for establishing appropriate housekeeping procedures. In addition, test procedures are provided for use in establishing the frequency and monitoring the effectiveness of the housekeeping. Updates from the previous edition include new techniques, streamlined procedures, and revised and additional figures.
- Published:
- 01/01/2002
- ISBN(s):
- 1877862851
- Number of Pages:
- 24
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