IEST RP-CC013.3 covers procedures for calibrating and verifying equipment used in char-acterizing cleanrooms and for determining intervals of calibration. The RP includes general procedures for calibrating aerosol generators, photometers, ane-mometers, airflow capture hoods, temperature measurement systems and devices, pressure and vacuum gauges, polymicrosphere (PSL) generators, aerosol diluters, and condensation nuclei counters. Where available, references for calibrating other instruments are provided
- Published:
- 08/01/2012
- Number of Pages:
- 40
- File Size:
- 1 file , 710 KB
- Note:
- This product is unavailable in Ukraine, Russia, Belarus
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